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1
題名:偏壓輔助成核對多晶CVD鑽石成長之影響     (16點)
The Effects of Bias-Enhanced Nucleation (BEN) on the Growth of Polycrystalline CVD Diamond Films
著者:李世鴻(Shih-Fong Lee) ;焦繼葳(Chi-Wei Chiao)
出版地區:台灣
出版城市:彰化縣
學科:自科綜合 ; 應科綜合
關鍵字:偏壓輔助成核 ; 微波輔助化學氣相沉積 ; 多晶鑽石 ; bias-enhanced nucleation (BEN) ; microwave-assisted chemical-vapor deposition (MACVD) ; polycrystalline diamond
刊名:科學與工程技術期刊
卷期:3卷1期(2007.3)
頁碼:1-8
語言:繁體中文
摘要: 中文摘要PDF ; 英文摘要PDF

本研究藉由改變偏壓輔助成核階段中包括偏壓時間、偏壓大小、碳氫濃度比、壓力等各種沉積參數,以探討偏壓輔助成核(bias-enhanced nucleation, BEN)對於多晶CVD(chemical vapor deposition)鑽石成長的影響,並探討個別參數對於多晶鑽石成長之影響。多晶鑽石是以微波輔助化學氣相沉積(microwave assisted chemical vapor deposition, MACVD)來成長,而其結構性質及電子性質則是由掃瞄式電子顯微鏡(scanning electron microscopy, SEM)、拉曼光譜(Raman spectroscopy)、及電導率來進行量測。最佳BEN參數組合包括微波功率(1000W)、反應時間(1.5hr)、碳氫濃度比(2.5%)、偏壓(-100V)、壓力(50torr)被採用作?本研究的起點。首先由實驗數據我們可發現,所成長的的鑽石薄膜的結構性質與電子性質之間有一致的趨勢,即拉曼光譜中在波數具有較小的FWHM(full width height maximum)與較大峰值背景值比的鑽石薄膜理應具有較佳之鑽石結晶結構,而相對應的電導率則會急遽降低,顯現出本徵鑽石半絕緣的性質。而薄膜的成長速率則與薄膜的結構及電子性質之間並沒有明顯的關聯性存在。相較於無BEN,我們發現無論就結構性質、電子性質或成長速率而言,鑽石薄膜的性質都有明顯改善的現象。我們發現在BEN階段中,無論偏壓大小、偏壓時間、碳氫濃度比、壓力等參數都會顯著影響所沉積鑽石薄膜的結構性質及電子性質,並且對不同沉積系統都會有其最佳的參數組合。
In this study, process parameters such as the bias voltage, duration, carbon-hydrogen concentration ratio, and pressure during the bias-enhanced nucleation (BEN) stage were varied to study the effects of BEN on the growth of polycrystalline diamond films. A structural and electronic characterization of the diamond films was implemented with scanning electron microscopy (SEM), Raman spectroscopy and conductivity measurements. The optimum combination of BEN process parameters including microwave power (1000W), BEN duration (1.5 hr), carbon-hydrogen concentration ratio (2.5%), bias voltage (-100V), and pressure (50 torr) was used as the starting point for this study. Our experimental results revealed that the structural and electronic properties are mutually consistent. I.e., diamond films with a smaller FWHM (full width height maximum) and a larger background value in their Raman spectrographs are considered to have better crystalline structures; moreover, their corresponding conductivities exhibiting the semi-insulating property of an intrinsic diamond decrease rapidly. The results also indicated that there is no clear relationship between the growth rate of films and their structural and electronic properties. When compared to diamond films grown without BEN, polycrystalline diamonds grown with BEN all exhibit definite improvement in structural and electronic properties as well as in their growth rates. Furthermore, it was found that the bias voltage and duration, the carbon-hydrogen concentration ratio, and the pressure during the BEN stage can affect the structural and electronic properties of deposited diamond films; moreover, depending on the deposition system design, there is an optimum combination of process parameters that yields the best polycrystalline diamond films.


    

本卷期目次
科學與工程技術期刊 3卷1期 (2007.3)
己內醯胺脫氮菌之分離、脫氮情形與生理特性/ 王俊欽李季眉
三維重疊式網格數值模擬法之建立/ 秦雅嫺
MC-CDMA系統工作於存在高斯相關分支與選頻性通道環境中的效能分析/ 陳雍宗劉昱吟
電腦輔助工程在CNC立式加工中心機進給系統高速化之應用/ 陳俊達王焜潔周信暐
Using an N-gram-Based Mapping Approach to Content-Based Music Information Retrieval/ Chueh-Chih LiuTe-Wei ChiangTien-Wei Tsai
對向汽車頭燈照射對正向駕駛者辨識距離的影響/ 楊旻洲王凱正
3吋小型液晶面板LED背光系統之薄型導光板設計研究/ 黃顯川楊萬隆葉志庭
偏壓輔助成核對多晶CVD鑽石成長之影響/ 李世鴻焦繼葳
利用共生詞彙特性發展一個二階段文件群集法/ 李維平吳澤民王美淳
偏壓輔助成核對多晶CVD鑽石成長之影響/ 李世鴻焦繼葳
對向汽車頭燈照射對正向駕駛者辨識距離的影響/ 楊旻洲王凱正
MC-CDMA系統工作於存在高斯相關分支與選頻性通道環境中的效能分析/ 陳雍宗劉昱吟
三維重疊式網格數值模擬法之建立/ 秦雅嫺
Using an N-gram-Based Mapping Approach to Content-Based Music Information Retrieval/ Chueh-Chih LiuTe-Wei ChiangTien-Wei Tsai
己內醯胺脫氮菌之分離、脫氮情形與生理特性/ 王俊欽李季眉
The Effects of Cutoff Voltage and Heat Treatment on the Behavior of a Nanocrystalline Cu-Doped Tin Oxide Applied to a Li-Ion Battery/ Shao-Ting ChangIng-Chi LeuMin-Hsiung Hon
電腦輔助工程在CNC立式加工中心機進給系統高速化之應用/ 陳俊達王焜潔周信暐
3吋小型液晶面板LED背光系統之薄型導光板設計研究/ 黃顯川楊萬隆葉志庭
利用共生詞彙特性發展一個二階段文件群集法/ 李維平吳澤民王美淳
 
   
 
   

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